A potentially significant on-wafer high-frequency measurement calibration error

IEEE Microwave Magazine

Volumn 6, Issue 4, 2005, Pages 94-100

  Rautio, James C ^a,b   Groves, Robert ^a,b  

^a Sonnet Software Inc   (United States)

^b IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVITY SUBSTRATES; SPIRAL INDUCTORS; SYNTHETIC CALIBRATION; WAFER FABRICATION;

CALIBRATION; ELECTRIC CONDUCTIVITY; ELECTRIC INDUCTORS; ERROR ANALYSIS; Q FACTOR MEASUREMENT; SUBSTRATES;

SILICON WAFERS;

EID: 31344459559     PISSN: 15273342     EISSN: None     Source Type: Trade Journal    
DOI: 10.1109/MMW.2005.1580342     Document Type: Review

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