Study and determination of pure element intensities for energy-dispersive X-ray fluorescence analysis

Journal of Trace and Microprobe Techniques

Volumn 19, Issue 1, 2001, Pages 25-33

  Younan, Hua ^a  

^a CHARTERED SEMICONDUCTOR MANUFACTURING LTD   (Singapore)

Author keywords

Bulk sample method; Determination of pure element intensity; Energy dispersive X ray fluorescence analysis; Low concentration method; Oxide sample method

Indexed keywords

EID: 31244437612     PISSN: 07334680     EISSN: None     Source Type: Journal    
DOI: 10.1081/TMA-100001459     Document Type: Article

References (15)

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