Work function increase of indium-tin-oxide surfaces by atmospheric air plasma treatment with steady-state airflow

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 5, 2005, Pages 1479-1482

  Choi, Jai Hyuk ^a   Lee, Eung Suok ^a   Choi, Sang Hun ^a   Baik, Hong Koo ^a   Song, Kie Moon ^b   Lim, Yong Sik ^b   Lee, Seong Min ^c  

^a Yonsei University   (South Korea)

^b Konkuk University   (South Korea)

^c SolarLight Ltd   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AIR; ATMOSPHERIC PRESSURE; CONTAMINATION; FREE RADICALS; INDIUM COMPOUNDS; PLASMAS; STEADY FLOW; TIN COMPOUNDS; X RAY SPECTROSCOPY;

AIRFLOW; ATMOSPHETIC AIR-PLASMA TREATMENT; INDIUM-TIN-OXIDE (ITO) SURFACES;

SURFACE TREATMENT;

EID: 31144473802     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2006137     Document Type: Article

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