Pulsed laser deposition of oxide thin films

Applied Surface Science

Volumn 252, Issue 7, 2006, Pages 2466-2471

  Ohnishi, T ^a,b   Koinuma, H ^b,c   Lippmaa, M ^a,b  

^a UNIVERSITY OF TOKYO   (Japan)

^b Combinatorial Materials Exploration and Technology ^*  (Japan)

^c NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Excimer laser; Oxide thin film; Pulsed laser deposition; SrTiO 3

Indexed keywords

EXCIMER LASERS; FILM GROWTH; OXIDES; THIN FILMS;

ENERGY DENSITY; OXIDE THIN FILMS; SLIT FORMING; SRTIO3;

PULSED LASER DEPOSITION;

EID: 31144472607     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.04.057     Document Type: Conference Paper

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