Motion error compensation method for hydrostatic tables using actively controlled capillaries

Journal of Mechanical Science and Technology

Volumn 20, Issue 1, 2006, Pages 51-58

  Park, Chun Hong ^a   Oh, Yoon Jin ^a   Hwang, Joo Ho ^a   Lee, Deug Woo ^b  

^a Korea Institute of Machine and Materials   (South Korea)

^b Pusan National University   (South Korea)

Author keywords

Actively Controlled Capillary; Angular Motion Error; Error Compensation; Hydrostatic Bearing Table; Linear Motion Error

Indexed keywords

EID: 31144470570     PISSN: 1738494X     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02916199     Document Type: Article

References (7)

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