Investigation of nitrogen flow variation into a radio frequency plasma cell on plasma properties and GaInNAs grown by molecular beam epitaxy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 3, 2005, Pages 1328-1332

  Yuen, Homan B ^a   Wistey, Mark A ^a   Bank, Seth R ^a   Bae, Hopil ^a   Harris Jr , James S ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GAS FLOW RATES; OPTICAL QUALITY; PLASMA CELL;

MOLECULAR BEAM EPITAXY; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; PLASMAS; SEMICONDUCTING GALLIUM COMPOUNDS;

NITROGEN;

EID: 31144452774     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1881592     Document Type: Conference Paper

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