Controllable two-dimensional photonic crystal patterns fabricated by nanosphere lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 4, 2005, Pages 1585-1588

  Han, Shuo ^a   Hao, Zhibiao ^a   Wang, Jian ^a   Luo, Yi ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; HYDROPHILICITY; LITHOGRAPHY; NANOSTRUCTURED MATERIALS; PHOTONS; SELF ASSEMBLY;

AIR-FILLING FACTOR; SELF-ASSEMBLED LAYER; SURFACE HYDROPHILICITY;

CRYSTALLINE MATERIALS;

EID: 31144450408     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1978892     Document Type: Article

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