Ammonium chloride complex formation during downstream microwave ammonia plasma treatment of parylene-C

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 6, 2005, Pages 1605-1609

  Pruden, K G ^a,b   Beaudoin, S P ^a,c  

^a Arizona State University   (United States)

^b UNIVERSITY OF CHICAGO   (United States)

^c Purdue University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMOLECULES; MICROWAVE AMMONIA PLASMA;

AMINES; BIOCOMPATIBILITY; INFRARED SPECTROSCOPY; MICROWAVES; NITROGEN; PLASMA APPLICATIONS; REFLECTION;

AMMONIUM COMPOUNDS;

EID: 31044452593     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2049305     Document Type: Article

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