40-nm particle high probability detection for bare wafer using side.scattered light

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 1926, Issue , 1993, Pages 536-545

  Noguchi, M ^a   Kembo, Y ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

PIXELS; PROBABILITY; SIGNAL TO NOISE RATIO;

DETECTION PROBABILITIES; DIFFRACTED LIGHT; DIFFRACTION MODELING; HIGH DETECTION PROBABILITY; HIGH PROBABILITY; HIGH SIGNAL-TO-NOISE RATIO; LIGHT-DETECTION SYSTEMS; PARTICLE DETECTION;

PROCESS CONTROL;

EID: 31044444879     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.148988     Document Type: Conference Paper

References (14)

1. R. G. Knollenberg: Proc. Institute of Environmental Sciences 32 (1986) 501.
2. J. Pecen, A. Neukermans, G. Kren and L. Galbraith: Solid State Technol. 30 (1987) 149.
3. L. Galbraith and A. Neukermans: Proc. SPIE 774 (1987) 13.
4. Y. Mori, H. An, K. Endo, K. Yamauchi, K. Sugiyama, H. Tsuchiya and T. Ide: Seimits Kougaku Kaisi 54 (1988) 100 [in Japanese].
5. Takami, T. Yachi, I. Hourai and Y Yatsugake: J. Aerosol Sci. 20 (1989) 457
6. R. G. Knollenberg: J. Aerosol Sci. 20 (1989) 331.
7. R. Lalezari and R. G. Knollenberg: Proc. SPIE 1164 (1989) 222.
8. Y. Mori, H. An, K. Endo, K. Yamauchi and T. Ide: Seimits Kougaku Kaisi 56 (1990) 81 [in Japanese].
9. T. Abe, E. F. Steigmeier, W. Hagleitner and A. J. Pidduck: Jpn. J. Appl. Phys. 31 (1992) 721.
10. M. Noguchi and Y. Kembo: Extended Abstracts of the 1992 International Conference on Solid State Device and Materials, Tsukuba, 1992, pp. 701-701.
11. M. Noguchi and Y. Kembo: Jpn. J. AppLPhys. Vol. 32 (1993) Part 1, No. IB January 1993.
12. M. Born and E. Wolf: Principles of Optics (Pergamon Press, Oxford, 1970) 4th ed., Chap 13, p. 647.
13. K. Sugiyama: Keiryo Kenkyujyo Houkoku 36 (1987) No. 2, p. 66 [in Japanese].
14. L. Levi: Applied Optics (John Wiley & Sons, Inc., New York, 1968) 1st ed., Chap. 3, p. 152.