Experimental apparatus for investigation of sputtering and secondary ion emission induced by energetic ion beams

Rapid Communications in Mass Spectrometry

Volumn 20, Issue 2, 2006, Pages 298-302

  Drozdziel, A ^a   Pyszniak, K ^a   Sielanko, J ^a   Turek, M ^a   Wojtowicz A ^a  

^a MARIA CURIE SK ODOWSKA UNIVERSITY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER CONTROL SYSTEMS; DATA ACQUISITION; IONS; SECONDARY EMISSION;

ELECTROMAGNETICS; EMISSION PROCESS; ENERGETIC ION BEAMS; ENERGY; EXPERIMENTAL APPARATUS; ION SPUTTERING; MASS SEPARATORS; QUADRUPOLE MASS SPECTROMETER; SECONDARY ION EMISSION; SPUTTERING PROCESS;

ION BEAMS;

EID: 31044444331     PISSN: 09514198     EISSN: 10970231     Source Type: Journal    
DOI: 10.1002/rcm.2306     Document Type: Article

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