메뉴 건너뛰기




Volumn 15, Issue 5, 2001, Pages 27-38

Using single-particle sizing to find your process endpoint

Author keywords

[No Author keywords available]

Indexed keywords


EID: 30844447189     PISSN: 08976627     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (1)

References (6)
  • 1
    • 30844449490 scopus 로고    scopus 로고
    • note
    • Most laser diffraction analyzers can examine dry powder samples without special sample preparation. Dry samples must be diluted before analysis by single-particle optical sensing units, which adds preparation time to the sizing analysis.
  • 2
  • 3
    • 0031375753 scopus 로고    scopus 로고
    • Particle size analysis: A comparative study of various methods II
    • F. Etzler and R. Deanne, "Particle size analysis: A comparative study of various methods II," Particle and Particle Systems Characterization, Volume 14, 1997, pages 278-282.
    • (1997) Particle and Particle Systems Characterization , vol.14 , pp. 278-282
    • Etzler, F.1    Deanne, R.2
  • 5
    • 30844438773 scopus 로고    scopus 로고
    • note
    • Laser diffraction sizing analyses were performed by Particle Sizing Systems' customers in their own facilities using various analyzer models; single-particle sizing analyses were performed at customer facilities by Particle Sizing Systems using the company's AccuSizer 780 optical particle sizer. All tests were performed between 1998 and 2000. For more test information, contact the authors.
  • 6
    • 30844452072 scopus 로고    scopus 로고
    • Perturbation detection analysis: A method for comparing instruments that can measure the presence of large particles in CMP slurry
    • San Diego, Calif., July
    • K. Nicholes, MR. Litchy, D.C. Grant, and R.K. Singh, "Perturbation detection analysis: A method for comparing instruments that can measure the presence of large particles in CMP slurry," Proceedings of SEMICON/West, San Diego, Calif., July 2000.
    • (2000) Proceedings of SEMICON/West
    • Nicholes, K.1    Litchy, M.R.2    Grant, D.C.3    Singh, R.K.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.