MEMS sensors for aerodynamic applications - The Good, the Bad (and the Ugly)

38th Aerospace Sciences Meeting and Exhibit

Volumn , Issue , 2000, Pages

  Breuer, Kenneth S ^a  

^a Brown University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 30744477358     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

1. Schmidt, M., Howe, R.T., Senturia, S.D. & Haritonidis, J.H. "Design and Calibration of a Microfabricated Floating-Element Shear-Stress Sensor". IEEE Transactions on Electron Devices. ED-35 pp.750-757. 1988.
2. th International Congress on Instrumentation in Aerospace Simulation Facilities. Dayton, OH. 1995.
3. Goldberg, H., Breuer, K.S. & Schmidt, M.A. "A silicon wafer-bonding technology for microfabricated shear-stress sensors with backside contacts. " In Proceedings of the Solid-State Sensor and Actuator Workshop. pp. 111-114. Hilton Head, SC. June 1994.
4. Padmanabhan, A, Goldberg, H. D, Breuer, K.S. & Schmidt, M. A. "A silicon microfabricated floating-element shear-stress sensor with optical position sensing by photodiodes. " In Proceedings of Transducers, 95. Stockholm, Sweden, June 1995.
5. Padmanabhan, A, Goldberg, H. D, Breuer, K.S. & Schmidt, M. A. "A wafer-bonded floating-element shear-stress microsensor with optical position sensing by photodiodes. " J. MicroEIectroMechanical Systems,. 5 (4) pp. 307-315. 1996.
6. Padmanabhan, A., Sheplak, M., Breuer, K.S., & Schmidt, M.A. "Micromachined sensors for static and dynamic shear-stress measurements in aerodynamic flows. " Proceedings of the IEEE Transducers '97 Conference, Chicago, IL, June 1997.
7. Lui, C, Tai, Y-C, Huang, J-B, & Ho, C-M. "Surface Micromachined Thermal Shear Stress Sensor". In Application of Microfabrication to Fluid Mechanics. Ed Bandyopadhyay et al. ASME FED 197. 1994.
8. F. Jiang, Y. C. Tai, C. M, Ho and W. J. Li, Technical Digest, Solid-state Sensor and Actuator Workshop, Hilton Head Island, pp. 264-267, 1994.
9. Kälvesten, E., Lofdahl, L & Stemme, G. "An Integrated Silicon Based Wall Pressure-Shear Stress Sensor for Measurement in Turbulent Flows". Sensors and Actuators. 1996.
10. Sheplak, M., Padmanabhan, A. Schmidt, M. A. & Breuer, K.S. "Dynamic calibration of a shear stress sensor using Stokes layer excitation". AIAA Paper 98-0585. Reno, NV. January 1998.
11. Goldberg, H., Piepsz, O., Breuer, K.S. & Schmidt, M.A. "A silicon microfabricated hot-wire anemometer utilizing a backside contact technology. " In Proceedings of the ASME Symposium on Applications of Micromachining to Fluid Mechanics. Chicago, IL. November 1994.
12. Freund, B. Personal Communication. 1999.
13. Breuer, K. S, Bayt, R.L. and Nayaar, A. MEMS-based shear and temperature sensors. In proceedings of the fourth Microfluidics Symposium. ASME Winter Annual Meeting. Nashville, TN. November 1999.