Precise periodic structuring with femtosecond-laser;Precise periodic structuring with femtosecond-laser

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 69, Issue 4, 2003, Pages 554-558

  Sawada, Hiroshi ^a   Kawahara, Kousuke ^a   Ninomiya, Takafumi ^a   Kurosawa, Kou ^a   Yokotani, Atsushi ^a  

^a NONE

Author keywords

Femtosecond laser; Interference; Laser ablation; Micromachining; Periodic structure; Silicon wafer; Surface scattered wave; Tribology

Indexed keywords

COPPER; IRRADIATION; LASER ABLATION; MICROMACHINING; POLARIZATION; RESINS; SILICON; SILICON WAFERS; TRIBOLOGY; WAVE INTERFERENCE;

ABLATION THRESHOLD; FEMTOSECOND LASER; PERIODIC STRUCTURE; SURFACE SCATERED WAVE;

LASERS;

EID: 30744465928     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.69.554     Document Type: Article

References (8)

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