High-rate synthesis of diamond by plasma CVD under higher pressure than atmospheric pressure;High-rate synthesis of diamond by plasma CVD under higher pressure than atmospheric pressure

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 69, Issue 10, 2003, Pages 1444-1448

  Toyota, Hiromichi ^a   Ide, Takashi ^a   Yagi, Hidetsugu ^a   Kakiuchi, Hiroaki ^a   Mori, Yuzo ^a  

^a NONE

Author keywords

Diamond; Growth rate; High pressure; Hydrogen; Methane; Microwave; Plasma CVD; Synthesis

Indexed keywords

ATMOSPHERIC PRESSURE; HYDROGEN; METHANE; MICROWAVES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SUBSTRATES; SYNTHESIS (CHEMICAL); THERMAL EFFECTS;

GROWTH RATE; HIGH PRESSURE; PLASMA CVD;

DIAMONDS;

EID: 30744436570     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.69.1444     Document Type: Article

References (4)