Experiments on the elastic size dependence of LPCVD silicon nitride

Materials Research Society Symposium Proceedings

Volumn 875, Issue , 2005, Pages 85-90

  Ren, Yuxing ^a   Lam, David C C ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTALLINE MATERIALS; ELASTICITY; STRAIN; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

BENDING TESTS; CRYSTALLINE SILICON; SURFACE STRESS THEORIES;

SILICON NITRIDE;

EID: 30644467684     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-875-o4.1     Document Type: Conference Paper

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