Laser crystallization - A way to produce crystalline silicon films on glass or on polymer substrates

Journal of Crystal Growth

Volumn 287, Issue 2, 2006, Pages 397-401

  Falk, F ^a   Andra G ^a  

^a LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY   (Germany)

Author keywords

A1. Solidification; A3. Laser epitaxy; B2. Semiconducting silicon; B3. Solar cells

Indexed keywords

AMORPHOUS MATERIALS; CRYSTALLIZATION; LASER APPLICATIONS; MELTING; POLYMERS; SEMICONDUCTING SILICON; SUBSTRATES;

CRYSTALLINE SILICON FILMS; EPITAXIAL THICKNING; LASER MELTING;

THIN FILMS;

EID: 30444449679     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2005.11.052     Document Type: Conference Paper

References (19)

1. G.K. Giust, and T.W. Sigmon IEEE Trans. Electron Dev. 47 2000 207
2. S. Uchikoga, and N. Ibaraki Thin Solid Films 383 2001 19
3. M. Hatano J. Korean Phys. Soc. 39 2001 S419
4. R. Becker, and W. Döring Ann. Phys. 24 1935 719
5. D. Kashchiev Nucleation 2000 Butterworth-Heinemann Oxford
6. D. Kashchiev Surf. Sci. 14 1969 209
7. K.A. Jackson, and B. Chalmers Can. J. Phys. 34 1956 473
8. D.H. Lowndes Appl. Phys. Lett. 48 1986 1389
9. J.S. Im, and H.J. Kim Appl. Phys. Lett. 64 1994 2303
10. S. Christiansen Mater. Res. Soc. Symp. Proc. 621 2000 Q7.5.1
11. A. Saboundji J. Non-Cryst. Solids 338-340 2004 758
12. G. Andrä, et al., in: Conference Record of the 29th IEEE Photovoltaic Special Conference 2002, p. 1306.
13. G. Andrä, et. al., in: Proceedings of the 20th European Photovoltaic Solar Energy Conference, 2005, p. 1171.
14. M. Mulato J. Appl. Phys. 82 1997 5159
15. S. Chiussi Appl. Surf. Sci. 186 2002 166
16. S. Urban Mater. Sci. Forum 389-393 2002 871
17. A. Hedler Appl. Surf. Sci. 205 2003 240
18. P.A. Stolk, A. Polman, and W.C. Sinke Phys. Rev. B 47 1993 5
19. P.V. Evans, and S.R. Stiffler Acta Metall. Mater. 39 1991 2727