Investigations regarding structure and optical properties of HfO2 films

Solid State Phenomena

Volumn 56, Issue , 1997, Pages 233-238

  Czigany Zs ^a   Mademann, D ^b   Weissbrodt, P ^b   Hacker, E ^b  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b JENOPTIK Laser Optik Systeme GmbH   (Germany)

Author keywords

Columnar structure; Laser damage; Optical properties; Porosity; Texture; Transmission electron microscopy; UV irradiation

Indexed keywords

CRYSTAL MICROSTRUCTURE; HAFNIUM COMPOUNDS; LASER APPLICATIONS; LASER BEAM EFFECTS; LIGHT REFLECTION; LIGHT SCATTERING; MORPHOLOGY; POROSITY; REFRACTIVE INDEX; TEXTURES; THIN FILMS; ULTRAVIOLET RADIATION;

HAFNIUM DIOXIDE;

OPTICAL COATINGS;

EID: 3042968773     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Article

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