Effects of low-temperature-grown GaAs and AlGaAs on the current of a metal-insulator-semiconductor structure

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 3, 1996, Pages 1745-1751

  Chen, C L ^a   Mahoney, L J ^a   Nichols, K B ^a   Manfra, M J ^a   Brown, E R ^a   Nitishin, P M ^a   Molvar, K M ^a   Gramstorff, B F ^a   Murphy, R A ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 3042933321     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588551     Document Type: Article

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