|
Volumn 14, Issue 4, 2003, Pages 275-280
|
Improving the anti-seizure ability of SiC seal in water with RIE texturing
|
Author keywords
Micro pit; Seizure; SiC; Texture; Water
|
Indexed keywords
SILICON CARBIDE;
|
EID: 3042848911
PISSN: 10238883
EISSN: None
Source Type: Journal
DOI: 10.1023/A:1022650813314 Document Type: Article |
Times cited : (190)
|
References (19)
|