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Volumn 10, Issue 2, 2004, Pages 14-17
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John Woollam's career in ellipsometry
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Author keywords
[No Author keywords available]
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Indexed keywords
BENCHMARKING;
DIELECTRIC MATERIALS;
ELECTRICAL ENGINEERING;
MAGNETISM;
MAXWELL EQUATIONS;
MICROELECTRONICS;
PROBLEM SOLVING;
REFRACTIVE INDEX;
SEMICONDUCTOR MATERIALS;
SILICON WAFERS;
STUDENTS;
SURFACE STRUCTURE;
THIN FILMS;
J.A. WOOLLAM (CO);
OVERCOAT FILM THICKNESS;
SPECTROSCOPIC ELLIPSOMETRY;
ELLIPSOMETRY;
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EID: 3042794174
PISSN: 10821848
EISSN: None
Source Type: Journal
DOI: None Document Type: Review |
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Times cited : (3)
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References (0)
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