Micro patterning of fluorescent nanoparticles by atomizers combined with electrostatic deposition and stencil mask

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 625-628

  Kim, Joon Wan ^a,b   Yamagata, Yutaka ^a   Kim, Beomjoon ^b   Higuchi, Toshiro ^b  

^a RIKEN   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIZERS; CHEMICAL VAPOR DEPOSITION; DROP FORMATION; ELECTRODEPOSITION; MASKS; MICROELECTROMECHANICAL DEVICES; SILICON COMPOUNDS;

ELECTROSTATIC DEPOSITION (ESD); ELECTROSTATIC FIELD GENERATOR; NANO PATTERNING; STENCIL MASKS;

NANOSTRUCTURED MATERIALS;

EID: 3042696949     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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