Quantification of periodic surface structures by white-light interferometry;Quantifizierung periodischer Oberflächenstrukturen mittels Weißlichtinterferometrie

Praktische Metallographie/Practical Metallography

Volumn 41, Issue 6, 2004, Pages 277-285

  Daniel, Claus ^a   Mücklich, Frank ^a  

^a SAARLAND UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC MICROSCOPES; FOURIER TRANSFORMS; INTERFEROMETRY; MATHEMATICAL MODELS; MIRRORS; PERSONAL COMPUTERS; SURFACE TOPOGRAPHY; CLUSTERING ALGORITHMS; FOURIER ANALYSIS; TOPOGRAPHY;

FOURIER ANALYSIS; PERIODIC SURFACE STRUCTURE; QUANTIFICATION; WHITE-LIGHT INTERFEROMETRY; FREQUENCY FILTRATION; LATERAL RESOLUTION; PERIODIC SURFACE STRUCTURES; QUANTITATIVE MEASUREMENT; REFLECTING SURFACE; THREE-DIMENSIONAL DATA;

SURFACE CHEMISTRY; FREQUENCY DOMAIN ANALYSIS;

EID: 3042682568     PISSN: 0032678X     EISSN: None     Source Type: Journal    
DOI: 10.1515/pm-2004-410604     Document Type: Article

References (8)

1. Maurer, M.; Mücklich, F.: Prakt Met. Sonderbd 30 (1999) 287-292
2. de Groot, P.; Deck, L.: Opt. Lett. 18 (1993) 17, 1462-1464
3. de Groot, P.: R&D Technical Bulletin, Zygo Corporation, 9/23/93
4. Daniel, C.; Liu, Z.; Mücklich, F.: Appl. Surf. Sci. 208-209 (2003) 317-321
5. Recktenwald, T.; Liu, Z.; Laurent, T.; Mücklich, F.: Prakt. Metallogr. 40 (2003) 6, 287-300
6. Daniel, C.; Mueller, J.; Mücklich, F.; Rehbein, P.; Haas, V.: Prakt. Metallogr. 40 (2003) 8, 377-386
7. Lipson, S. G.; Lipson, H. S.; Tannhauser, D. S.: Optik, Springer, Berlin, 1997
8. Daniel, C.; Lasagni, A.; Mücklich, F.: Surf. Coat. Technol. (in print)