The search for low-ε and ultra-low-ε dielectrics: How far can you get with polymers? Part 2: Materials, structures, properties

IEEE Electrical Insulation Magazine

Volumn 20, Issue 3, 2004, Pages 6-24

  Maier, Gerhard ^a  

^a POLYMATERIALS AG   (Germany)

Author keywords

Dielectric; Interlayer dielectric (ILD); Intermetal dielectric (IMD); Low dielectrics; Low polymer; Low k polymer; Polymers for microelectronics

Indexed keywords

INTERLAYER DIELECTRIC; INTERMETAL DIELECTRIC MATERIAL;

INTERMETALLICS; ORGANIC POLYMERS; PERMITTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; STRUCTURE (COMPOSITION); SYNTHESIS (CHEMICAL);

DIELECTRIC MATERIALS;

EID: 3042623402     PISSN: 08837554     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEI.2004.1307082     Document Type: Article

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