Sputtering-assisted production of multicharged boron ions from solid material in a 2.45 GHz electron cyclotron resonance source

Review of Scientific Instruments

Volumn 67, Issue 6, 1996, Pages 2171-2175

  Kato, Yushi ^a   Ishii, Shigeyuki ^a  

^a TOYAMA PREFECTURAL UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 3042594549     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1147032     Document Type: Article

References (16)

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