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Volumn 14, Issue 4, 2004, Pages 217-225
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Processing of freestanding DLC films for micromachine parts by focused ion beam technique
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Author keywords
FIB; Freestanding DLC; Micromachine
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
GEARS;
ION BEAMS;
MICROMACHINING;
RESIDUAL STRESSES;
SHAFTS (MACHINE COMPONENTS);
SILICON WAFERS;
SINGLE CRYSTALS;
DEEP HOLE PROCESSING;
FOCUSED ION BEAM (FIB) TECHNIQUE;
FREESTANDING DLC;
DIAMOND LIKE CARBON FILMS;
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EID: 3042587709
PISSN: 13449931
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (4)
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References (12)
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