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Volumn 14, Issue 4, 2004, Pages 217-225

Processing of freestanding DLC films for micromachine parts by focused ion beam technique

Author keywords

FIB; Freestanding DLC; Micromachine

Indexed keywords

CHEMICAL VAPOR DEPOSITION; GEARS; ION BEAMS; MICROMACHINING; RESIDUAL STRESSES; SHAFTS (MACHINE COMPONENTS); SILICON WAFERS; SINGLE CRYSTALS;

EID: 3042587709     PISSN: 13449931     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (4)

References (12)
  • 2
    • 0027662845 scopus 로고
    • A. Grill: Wear 168 (1993) 143.
    • (1993) Wear , vol.168 , pp. 143
    • Grill, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.