First operation of ECR ion source at Kochi university of technology

Review of Scientific Instruments

Volumn 75, Issue 5 PART II, 2004, Pages 1497-1498

  Momota, Sadao ^a   Nojiri, Yoichi ^a   Saihara, Miwako ^a   Sakamoto, Asako ^a   Hamagawa, Hisayoshi ^a   Hamaguchi, Kensuke ^a  

^a KOCHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; ION BEAM LITHOGRAPHY; ION BEAMS; IONIZATION; IRRADIATION; NANOSTRUCTURED MATERIALS; OPTIMIZATION; PARAMETER ESTIMATION; SYSTEMS ANALYSIS;

CHARGED IONS; COULOMB POTENTIAL; ECR ION SOURCE (ECRIS); KOCHI UNIVERSITY OF TECHNOLOGY (KUT);

ELECTRON CYCLOTRON RESONANCE;

EID: 3042565390     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1690450     Document Type: Conference Paper

References (5)

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2. D. M. Longo, W. E. Benson, T. Chraska, and R. Hull, Appl. Phys. Lett. 78, 981 (2001).
3. R. E. Marrs, P. Beiersdorfer, and D. Schneider, Phys. Today 47, 27 (1994).
4. C. Bieth et al., Proceedings of the 14th International Workshop on ECR Sources, Geneva, 1999, p. 147.
5. http://www.pantechnik.net