Plasma CVD characterization of nanocarbon film growth

Surface and Interface Analysis

Volumn 36, Issue 5-6 SPEC. ISS., 2004, Pages 481-484

  Obraztsov, A N ^a   Zolotukhin, A A ^a   Ustinov, A O ^a   Volkov, A P ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

Carbon; Nanostructures; Optical emission spectra; Plasma CVD

Indexed keywords

CARBON; COMPOSITION; DIMERS; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ELECTRON SPECTROSCOPY; FILM GROWTH; METHANE; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY;

CARBON CONDENSATION; GAS MIXTURE; OPTICAL EMISSION SPECTRA; PLASMA CVD;

CARBON NANOTUBES;

EID: 3042558040     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1722     Document Type: Conference Paper

References (8)

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