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Volumn 5, Issue , 2003, Pages

Interaction of CH3 and H with amorphous hydrocarbon surfaces: Estimation of reaction cross sections using Bayesian probability theory

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EID: 3042536899     PISSN: 13672630     EISSN: None     Source Type: Journal    
DOI: 10.1088/1367-2630/5/1/133     Document Type: Article
Times cited : (8)

References (25)
  • 1
    • 0032614255 scopus 로고    scopus 로고
    • Diamond-like carbon: State of the art
    • Grill A 1999 Diamond-like carbon: state of the art Diamond Relat. Mater. 8 428
    • (1999) Diamond Relat. Mater. , vol.8 , pp. 428
    • Grill, A.1
  • 2
    • 0001417170 scopus 로고    scopus 로고
    • Applications of diamond-like carbon thin films
    • Lettington A H 1998 Applications of diamond-like carbon thin films Carbon 36 555
    • (1998) Carbon , vol.36 , pp. 555
    • Lettington, A.H.1
  • 3
    • 0032482860 scopus 로고    scopus 로고
    • Surface reactions during growth and erosion of hydrocarbon films
    • Jacob W 1998 Surface reactions during growth and erosion of hydrocarbon films Thin Solid Films 326 1
    • (1998) Thin Solid Films , vol.326 , pp. 1
    • Jacob, W.1
  • 4
    • 0001953731 scopus 로고
    • Plasma deposition, properties and structure of amorphous hydrogenated carbon films
    • Koidl P, Wild Ch, Dischler B, Wagner J and Ramsteiner M 1989 Plasma deposition, properties and structure of amorphous hydrogenated carbon films Mater. Sci. Forum 52/53 41
    • (1989) Mater. Sci. Forum , vol.52-53 , pp. 41
    • Koidl, P.1    Wild, Ch.2    Dischler, B.3    Wagner, J.4    Ramsteiner, M.5
  • 5
    • 36449007906 scopus 로고
    • Role of hydrogen ions in plasma-enhanced chemical vapor deposition of hydrocarbon films, investigated by in situ ellipsometry
    • von Keudell A, Jacob W and Fukarek W 1995 Role of hydrogen ions in plasma-enhanced chemical vapor deposition of hydrocarbon films, investigated by in situ ellipsometry Appl. Phys. Lett. 66 1322
    • (1995) Appl. Phys. Lett. , vol.66 , pp. 1322
    • Von Keudell, A.1    Jacob, W.2    Fukarek, W.3
  • 6
    • 0036150219 scopus 로고    scopus 로고
    • Formation of polymer-like hydrocarbon films from radical beams of methyl and atomic hydrogen
    • von Keudell A 2002 Formation of polymer-like hydrocarbon films from radical beams of methyl and atomic hydrogen Thin Solid Films 402 1
    • (2002) Thin Solid Films , vol.402 , pp. 1
    • Von Keudell, A.1
  • 7
    • 0034966546 scopus 로고    scopus 로고
    • Simultaneous interaction of methyl radicals and atomic hydrogen with amorphous hydrogenated carbon films, as investigated with optical in situ diagnostics
    • von Keudell A, Meier M and Schwarz-Selinger T 2001 Simultaneous interaction of methyl radicals and atomic hydrogen with amorphous hydrogenated carbon films, as investigated with optical in situ diagnostics Appl. Phys. A 72 551
    • (2001) Appl. Phys. A , vol.72 , pp. 551
    • Von Keudell, A.1    Meier, M.2    Schwarz-Selinger, T.3
  • 8
    • 0001344845 scopus 로고    scopus 로고
    • Simultaneous interaction of methyl radicals and atomic hydrogen with amorphous hydrogenated carbon films
    • von Keudell A, Schwarz-Selinger T and Jacob W 2001 Simultaneous interaction of methyl radicals and atomic hydrogen with amorphous hydrogenated carbon films J. Appl. Phys. 89 2979
    • (2001) J. Appl. Phys. , vol.89 , pp. 2979
    • Von Keudell, A.1    Schwarz-Selinger, T.2    Jacob, W.3
  • 9
    • 0003143722 scopus 로고    scopus 로고
    • Direct identification of the synergism between methyl radicals and atomic hydrogen during growth of amorphous hydrogenated carbon films
    • von Keudell A, Schwarz-Selinger T, Meier M and Jacob W 2000 Direct identification of the synergism between methyl radicals and atomic hydrogen during growth of amorphous hydrogenated carbon films Appl. Phys. Lett. 76 676
    • (2000) Appl. Phys. Lett. , vol.76 , pp. 676
    • Von Keudell, A.1    Schwarz-Selinger, T.2    Meier, M.3    Jacob, W.4
  • 10
    • 0003143722 scopus 로고    scopus 로고
    • Direct identification of the synergism between methyl radicals and atomic hydrogen during growth of amorphous hydrogenated carbon films
    • erratum
    • von Keudell A, Schwarz-Selinger T, Meier M and Jacob W 2000 Direct identification of the synergism between methyl radicals and atomic hydrogen during growth of amorphous hydrogenated carbon films Appl. Phys. Lett. 77 459 (erratum)
    • (2000) Appl. Phys. Lett. , vol.77 , pp. 459
    • Von Keudell, A.1    Schwarz-Selinger, T.2    Meier, M.3    Jacob, W.4
  • 11
    • 0035477611 scopus 로고    scopus 로고
    • Hydrogen elimination as a key step for the formation of polymerlike hydrocarbon films
    • Meier M and von Keudell A 2001 Hydrogen elimination as a key step for the formation of polymerlike hydrocarbon films J. Appl. Phys. 90 3585
    • (2001) J. Appl. Phys. , vol.90 , pp. 3585
    • Meier, M.1    Von Keudell, A.2
  • 14
    • 0040878740 scopus 로고
    • The hydrogen surface chemistry of carbon as a plasma facing material
    • Küppers J 1995 The hydrogen surface chemistry of carbon as a plasma facing material Surf. Sci. Rep. 22 249
    • (1995) Surf. Sci. Rep. , vol.22 , pp. 249
    • Küppers, J.1
  • 15
    • 0023168201 scopus 로고
    • Chemical erosion of amorphous hydrogenated carbon films by atomic and energetic hydrogen
    • Vietzke E, Flaskamp K, Phillips V, Esser G, Wienhold P and Winter J 1987 Chemical erosion of amorphous hydrogenated carbon films by atomic and energetic hydrogen J. Nucl. Mater. 145-147 443
    • (1987) J. Nucl. Mater. , vol.145-147 , pp. 443
    • Vietzke, E.1    Flaskamp, K.2    Phillips, V.3    Esser, G.4    Wienhold, P.5    Winter, J.6
  • 16
    • 0001188118 scopus 로고    scopus 로고
    • Plasma chemical vapor deposition of hydrocarbon films: The influence of hydrocarbon source gas on the film properties
    • Schwarz-Selinger T, von Keudell A and Jacob W 1999 Plasma chemical vapor deposition of hydrocarbon films: the influence of hydrocarbon source gas on the film properties J. Appl. Phys. 86 3988
    • (1999) J. Appl. Phys. , vol.86 , pp. 3988
    • Schwarz-Selinger, T.1    Von Keudell, A.2    Jacob, W.3
  • 18
    • 3042661184 scopus 로고    scopus 로고
    • private communication
    • Schwarz-Selinger 2002 private communication
    • (2002)
    • Schwarz-Selinger1
  • 19
    • 32344446687 scopus 로고
    • Understanding the Metropolis-Hastings algorithm
    • Chib S and Greenberg E 1995 Understanding the Metropolis-Hastings algorithm Am. Stat. 49 327
    • (1995) Am. Stat. , vol.49 , pp. 327
    • Chib, S.1    Greenberg, E.2
  • 20
    • 0026883101 scopus 로고
    • Interaction of atomic hydrogen with the surface methyl group on Si(100) - Removal of surface carbon
    • Cheng C C, Lucas S R, Gutleben H, Choyke W J and Yates J T Jr 1992 Interaction of atomic hydrogen with the surface methyl group on Si(100) - Removal of surface carbon Surf. Sci. Lett. 273 L441
    • (1992) Surf. Sci. Lett. , vol.273
    • Cheng, C.C.1    Lucas, S.R.2    Gutleben, H.3    Choyke, W.J.4    Yates Jr., J.T.5
  • 21
    • 0043046120 scopus 로고    scopus 로고
    • Diamond growth chemistry: Its observation using real time in situ molecular beam scattering techniques
    • Loh K P, Foord J S and Jackman R B 1997 Diamond growth chemistry: its observation using real time in situ molecular beam scattering techniques Diamond. Relat. Mater. 6 219
    • (1997) Diamond. Relat. Mater. , vol.6 , pp. 219
    • Loh, K.P.1    Foord, J.S.2    Jackman, R.B.3
  • 22
    • 0032021568 scopus 로고    scopus 로고
    • Surface studies of the reactivity of methyl, acetylene and atomic hydrogen at CVD diamond surfaces
    • Foord J S, Loh K P and Jackman R B 1998 Surface studies of the reactivity of methyl, acetylene and atomic hydrogen at CVD diamond surfaces Surf. Sci. 399 1
    • (1998) Surf. Sci. , vol.399 , pp. 1
    • Foord, J.S.1    Loh, K.P.2    Jackman, R.B.3
  • 24
    • 0001424796 scopus 로고
    • Molecular-dynamics simulations of methyl-radical deposition on diamond (100) surfaces
    • Alfonso D R and Ulloa S E 1993 Molecular-dynamics simulations of methyl-radical deposition on diamond (100) surfaces Phys. Rev. B 48 12235
    • (1993) Phys. Rev. B , vol.48 , pp. 12235
    • Alfonso, D.R.1    Ulloa, S.E.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.