Influence of charge trapping on ac reliability of high-k dielectrics

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 2004, Pages 585-586

  Kerber, M ^a   Duschl, R ^a   Reisinger, H ^a   Jakschik, S ^a   Schroder U ^a   Hecht, T ^a   Kudelka, S ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; DIELECTRIC MATERIALS; DYNAMIC RANDOM ACCESS STORAGE; ELECTRIC CHARGE; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ELECTRODES; EXTRAPOLATION; PERMITTIVITY; SILICON; WEIBULL DISTRIBUTION;

CHARGE TRAPPING; TRENCH CAPACITOR ARRAYS;

CAPACITORS;

EID: 3042513272     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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