Nanocluster ion source by plasma-gas aggregation

Review of Scientific Instruments

Volumn 75, Issue 5 PART II, 2004, Pages 1907-1909

  Imanaka, Masashi ^a   Katayama, Takeshi ^a   Ohshiro, Yukimitsu ^a   Watanabe, Shin Ichi ^a   Arai, Hideyuki ^b   Nakagawa, Takahide ^c  

^a UNIVERSITY OF TOKYO   (Japan)

^b UNIVERSITY OF TSUKUBA   (Japan)

^c INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ION BEAMS; MAGNETRON SPUTTERING; MAGNETS; MASS SPECTROMETERS; MASS SPECTROMETRY; MICROWAVES; MOSFET DEVICES; PLASMA SOURCES; SOLID STATE PHYSICS;

CLUSTER ION SOURCES; GAS AGGREGATION CELLS; NANOCLUSTER BEAMS; TIME OF FLIGHT (TOF) MASS SPECTROMETERS;

ION SOURCES;

EID: 3042511716     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1702118     Document Type: Conference Paper

References (8)

1. H. Haberland, in Clusters of Atoms and Molecules I, edited by H. Haberland (Springer, Berlin, 1995), p. 207.
2. H. Haberland, K. Karrais, and M. Mall, Z. Phys. D: At., Mol. Clusters 20, 413 (1991).
3. I. Yamada, J. Matsuo, N. Toyoda, T. Aoki, E. Jones, and Z. Insepov, AIP Conf. Proc. 416, 310 (1998).
4. C. K. Chung, Ph.D. thesis, University of Tsukuba, 2001.
5. W. E. Stephens, Phys. Rev. 69, 691 (1946).
6. J. L. Wizza, Nucl. Instrum. Methods 162, 587 (1979).
7. S. Bhattacharjee, T. Nakagawa, M. Kase, A. Goto, and Y. Yano, RIKEN Accel Prog. Report No 33, 2000, p. 200.
8. S. Bhattacharjee, H. Amemiya, and Y. Yano, J. Appl. Phys. 89, 3573 (2001).