Determination of the debris produced from poly(ethylene terephthalate) during KrF excimer laser ablation

Applied Surface Science

Volumn 252, Issue 6, 2006, Pages 2319-2327

  Shin, Dong Sig ^b   Lee, Jae Hoon ^a   Suh, Jeong ^a   Kim, To Hoon ^b  

^a Korea Institute of Machine and Materials   (South Korea)

^b Yonsei University   (South Korea)

Author keywords

ATR FT IR spectroscopy; Chromophore; KrF excimer laser; Laser ablation; NMR spectroscopy; Poly(ethylene terephthalate); Surface debris; UV vis spectroscopy

Indexed keywords

CHROMOPHORES; DEBRIS; EXCIMER LASERS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LASER ABLATION; LASER THEORY; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY;

ATR FT-IR SPECTROSCOPY; KRF EXCIMER LASER; SURFACE DEBRIS; UV-VIS SPECTROSCOPY;

POLYETHYLENE TEREPHTHALATES;

EID: 30144441889     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.04.019     Document Type: Article

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