Basic Performance of VUV Exposure Systems Using Head-on Type Ar2* and Kr2* DBD Excimer Lamps

Journal of Light and Visual Environment

Volumn 26, Issue 1, 2002, Pages 35-41

  Hirose, Kenichi ^a   Sugahara, Hiroshi ^a   Matsuno, Hiromitsu ^a  

^a NONE

Author keywords

Ar2*excimer; Dielectric barrier discharge; Exdmer lamp; Exposure system; Kr2*excimer; Vacuume ultraviolet

Indexed keywords

EID: 29944440324     PISSN: 03878805     EISSN: 13498398     Source Type: Journal    
DOI: 10.2150/jlve.26.1_35     Document Type: Article

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