Fabrication of ultralow-profile micromachined inductor with magnetic core material

IEEE Transactions on Magnetics

Volumn 41, Issue 12, 2005, Pages 4397-4400

  Gao, Xiao Yu ^a   Zhou, Yong ^a   Ding, Wen ^a   Cao, Ying ^a   Lei, Chong ^a   Chen, Ji An ^a   Zhao, Xiao Lin ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Inductance; Magnetic cores; Microelectromechanical systems (MEMS); Microinductors; Quality factor

Indexed keywords

MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROINDUCTORS; QUALITY FACTOR; ULTRALOW PROFILE;

ASPECT RATIO; DRY ETCHING; ELECTROPLATING; INDUCTANCE; MAGNETIC CORES; MAGNETIC MATERIALS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING;

ELECTRIC INDUCTORS;

EID: 29744452210     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2005.858440     Document Type: Article

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