Nanoimprint lithography enables fabrication of subwavelength optics

Laser Focus World

Volumn 41, Issue 12, 2005, Pages 76-81

  Wang, Jian ^a   Kostal, Hubert ^a  

^a NanoOpto   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANOIMPRINT TECHNOLOGY; WAFER-SCALE PRODUCTION;

COST EFFECTIVENESS; DIFFRACTION GRATINGS; OPTICAL DEVICES;

LITHOGRAPHY;

EID: 29744445162     PISSN: 10438092     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (0)