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Volumn 64, Issue 7, 1998, Pages 983-986
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Super smooth polishing technology for aspheric mirrors
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Author keywords
Aspheric mirror; Decomvolution; Phase shifting diffraction interferometer; Power spectral density analysis; Super smooth polishing
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Indexed keywords
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EID: 2942757847
PISSN: 09120289
EISSN: None
Source Type: Journal
DOI: 10.2493/jjspe.64.983 Document Type: Article |
Times cited : (7)
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References (9)
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