Fabrication of internal diffraction gratings in calcium fluoride crystals by a focused femtosecond laser

Optics Express

Volumn 12, Issue 5, 2004, Pages 742-746

  Zhao, Quan Zhong ^a   Qiu, Jian Rong ^a   Jiang, Xiong Wei ^a   Zhao, Chong Jun ^a   Zhu, Cong Shan ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CALCIUM COMPOUNDS; COMPUTER SIMULATION; LASER BEAM EFFECTS; MATHEMATICAL MODELS; REFRACTIVE INDEX; SINGLE CRYSTALS; THERMAL EFFECTS; ULTRAVIOLET RADIATION;

ABSORPTION SPECTRA; ANNEALING TEMPERATURE DEPENDENCE; LASER MATERIAL PROCESSING; ULTRAFAST LASERS;

DIFFRACTION GRATINGS;

EID: 2942729890     PISSN: 10944087     EISSN: None     Source Type: Journal    
DOI: 10.1364/OPEX.12.000742     Document Type: Article

References (13)

1. R. Lindner, U. Stamm, R. Pätzel and D. Basting, "Advanced ArF excimer laser for 193 nm lithography," Microelectron. Eng. 41/42, 75-78 (1998).
2. T. Itani and W. Wakamiya, "Progress in 157-nm lithography development for 70-nm node," Microelectron. Eng. 61-62, 49-55 (2002).
3. 2 at room temperature: Coloring kinetics and thermal annealing," Phys. Rev. B 9, 775-80 (1974).
4. A. Smakula, "Color centers in Calcium Fluoride and Barium Fluoride Crystals," Phys. Rev. 77, 408-409 (1950).
5. K. M. Davis, K. Miura, N. Sugimoto and K. Hirao, "Writing waveguides in glass with a femtosecond laser," Opt. Lett. 21, 1729-31 (1996).
6. K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, "Photowritten optical waveguides in various glasses with ultrashort pulse laser," Appl. Phys. Lett. 71, 3329-31 (1997).
7. D. Homoelle, S. Wielandy, A. L. Gaeta, N. F. Borrelli and C. Smith, "Infrared photosensitivity in silica glasses exposed to femtosecond laser pulses," Opt. Lett. 24, 1311-13 (1999).
8. J. Qiu, P. G. Kazansky, J. Si, K. Miura, T. Mitsuyu, K. Hirao and A. L. Gaeta, "Memorized polarization-dependent light scattering in rare-earth-ion-doped glass," Appl. Phys. Lett. 77, 1940-42 (2000).
9. H. Sun, Y. Xu, S. Juodkazis, K. Sun, M. Watanabe, S. Matsuo, H. Misawa and J. Nishii, "Arbitrary-lattice photonic crystals created by multiphoton microfabrication," Opt. Lett. 26, 325-27 (2001).
10. J. Qiu, C. Zhu, T. Nakaya, J. Si, F. Ogura, K. Kojima and K. Hirao, "Space-selective valence state manipulation of transition metal ions inside glasses by a femtosecond laser," Appl. Phys. Lett. 79, 3567-69 (2001).
11. Q. Zhao, J. Qiu, L. Yang, X. Jiang, C. Zhao and C. Zhu, "Fabrication of microstructures in LiF crystals by a femtosecond laser," Chin. Phys. Lett. 20, 1858-60 (2003)
12. H. Kogelnik, "Coupled wave theory for thick hologram gratings," Bell Syst. Tech. J. 48, 2909-47 (1969).
13. 2 crystals and their application for excimer laser optics," J. Cryst. Growth 162, 79-82 (1996).