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Volumn 45, Issue 10, 2002, Pages 749-753

Effect of treatment for Si substrate on the crystal structure of β-FeSi2 thin film

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; IRON COMPOUNDS; SILICON; SPUTTER DEPOSITION; SUBSTRATES; SURFACE TREATMENT; ULTRAHIGH VACUUM; X RAY DIFFRACTION;

ION BEAM SPUTTER DEPOSITION (IBSD); SURFACE DISTORTION;

THIN FILMS;

EID: 2942729392 PISSN: 05598516 EISSN: None Source Type: Journal
DOI: 10.3131/jvsj.45.749 Document Type: Article

Times cited : (1)

References (14)

2
- 0002195285
- Charalabos A. Dimitriadis and Jurgen H. Werner: J. Appl. Phys., 68 (1990) 93.
- (1990) J. Appl. Phys. , vol.68 , pp. 93
- Dimitriadis, C.A.¹ Werner, J.H.²

3
- 0033907398
- T. Yoshitake, T. Nagamoto and K. Nagayama: Mater. Sci. Eng., B72 (2000) 124.
- (2000) Mater. Sci. Eng. , vol.B72 , pp. 124
- Yoshitake, T.¹ Nagamoto, T.² Nagayama, K.³

4
- 0001006251
- L. Wang, L. Qin, Y. Zheng, Q. Shen, X. Chen, X. Lin, C. Lin and S. Zou: Appl. Phys. Lett., 65 (1994) 3105.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 3105
- Wang, L.¹ Qin, L.² Zheng, Y.³ Shen, Q.⁴ Chen, X.⁵ Lin, X.⁶ Lin, C.⁷ Zou, S.⁸

5
- 0034292041
- T. Suemasu, Y. Negishi, K. Takakura and F. Hasegawa: Jpn. J. Appl. Phys., 39 (2000) L1013.
- (2000) Jpn. J. Appl. Phys. , vol.39
- Suemasu, T.¹ Negishi, Y.² Takakura, K.³ Hasegawa, F.⁴

6
- 0000467968
- H. Katsumata, Y. Makita, N. Kobayashi, H. Shibata, M. Hasegawa, I. Aksenov, S. Kimura, A. Obara and S. Uekusa: J. Appl. Phys., 80 (1996) 5955.
- (1996) J. Appl. Phys. , vol.80 , pp. 5955
- Katsumata, H.¹ Makita, Y.² Kobayashi, N.³ Shibata, H.⁴ Hasegawa, M.⁵ Aksenov, I.⁶ Kimura, S.⁷ Obara, A.⁸ Uekusa, S.⁹

7
- 0035904916
- M. Sasase, T. Nakanoya, H. Yamamoto and K. Hojou: Thin Solid Films, 401 (2001) 73.
- (2001) Thin Solid Films , vol.401 , pp. 73
- Sasase, M.¹ Nakanoya, T.² Yamamoto, H.³ Hojou, K.⁴

8
- 33750831743
- T. Saito, H. Yamamoto, H. Asaoka, M. Haraguchi, M. Imamura, N. Matsubayashi, T. Tanaka, H. Shimada and K. Hojou: Anal. Sci., 17 (2001) 11073.
- (2001) Anal. Sci. , vol.17 , pp. 11073
- Saito, T.¹ Yamamoto, H.² Asaoka, H.³ Haraguchi, M.⁴ Imamura, M.⁵ Matsubayashi, N.⁶ Tanaka, T.⁷ Shimada, H.⁸ Hojou, K.⁹

10
- 0036670020
- T. Saito, H. Yamamoto, M, Sasase, T. Nakanoya, K. Yamaguchi, M. Haraguchi and K. Hojou: Thin Solid Films, 415 (2002) 138.
- (2002) Thin Solid Films , vol.415 , pp. 138
- Saito, T.¹ Yamamoto, H.² Sasase, M.³ Nakanoya, T.⁴ Yamaguchi, K.⁵ Haraguchi, M.⁶ Hojou, K.⁷

11
- 0003689862
- American Society for Metals, Park, OH
- T. B. Massalski, H. Okamoto, P. R. Subramanian and L. Kacprzak; Binary Alloy Phase Diagrams, 2nd ed., (American Society for Metals, Park, OH, 1990).
- (1990) Binary Alloy Phase Diagrams, 2nd Ed.
- Massalski, T.B.¹ Okamoto, H.² Subramanian, P.R.³ Kacprzak, L.⁴

12
- 0014800514
- W. Kern and D. A. Puotinen: RCA Review (1970) 187.
- (1970) RCA Review , pp. 187
- Kern, W.¹ Puotinen, D.A.²

13
- 0001293081
- T. Sakamoto, T. Takahashi, E. Suzuki, A. Shoji, H. Kawanami, Y. Komiya and Y. Tarui: Surf. Sci., 86 (1979) 102.
- (1979) Surf. Sci. , vol.86 , pp. 102
- Sakamoto, T.¹ Takahashi, T.² Suzuki, E.³ Shoji, A.⁴ Kawanami, H.⁵ Komiya, Y.⁶ Tarui, Y.⁷

14
- 0003412161
- Pergamon Press, New York
- J. F. Ziegler, J. B. Biersack and U. Littmark: The Stopping and Range of Ions in Solids (Pergamon Press, New York, 1985).
- (1985) The Stopping and Range of Ions in Solids
- Ziegler, J.F.¹ Biersack, J.B.² Littmark, U.³

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