Micromachining of a thin film by laser ablation using femtosecond laser with masks

Optics and Lasers in Engineering

Volumn 42, Issue 4, 2004, Pages 389-393

  Nakata, Yoshiki ^a   Okada, Tatsuo ^a   Maeda, Mitsuo ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

Femtosecond laser; Laser ablation; Mask transfer; Micromachining

Indexed keywords

FOURIER TRANSFORMS; INFORMATION SCIENCE; LASER ABLATION; LASER BEAMS; MASKS; MICROMACHINING; OPTICAL ENGINEERING; THERMAL EFFECTS;

FEMTOSECOND LASER; LASER FLUENCE; MASK TRANSFER; MATERIAL PROCESSING;

THIN FILMS;

EID: 2942648739     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2004.03.001     Document Type: Article

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