Depth profile analysis on the nanometer scale by a combination of electron probe microanalysis (EPMA) and focused ion beam specimen preparation (FIB)

Microchimica Acta

Volumn 145, Issue 1-4, 2004, Pages 187-192

  Richter, Silvia ^a   Bückins, Matthias ^a   Aretz, Anke ^a   Kyrsta, Stepan ^a   Spähn, Michael ^a   Mayer, Joachim ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Electron probe microanalysis; Focused ion beam; Multilayered structure; Quantitative depth profiling; Surface analysis

Indexed keywords

GALLIUM;

ACCURACY; CALIBRATION; CHEMICAL ANALYSIS; CHEMICAL COMPOSITION; CHEMICAL STRUCTURE; CONCENTRATION (PARAMETERS); CONFERENCE PAPER; DENSITY; ELECTRON BEAM; ELECTRON PROBE MICROANALYSIS; GEOMETRY; MASS; NANOPARTICLE; OPTICS; PUBLICATION; QUANTITATIVE ANALYSIS; RATING SCALE; SURFACE PROPERTY;

EID: 2942633837     PISSN: 00263672     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00604-003-0151-9     Document Type: Conference Paper

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