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Volumn 460, Issue 1-2, 2004, Pages 125-132

Characterization of tribo-layers on self-lubricating PACVD TiN coatings

Author keywords

Chlorine; Low friction; Plasma assisted chemical vapor deposition; Solid lubrication; TiN coating

Indexed keywords

ATMOSPHERIC HUMIDITY; AUGER ELECTRON SPECTROSCOPY; FRICTION; LUBRICANTS; LUBRICATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PROFILOMETRY; RAMAN SPECTROSCOPY; TITANIUM NITRIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 2942618699     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.01.091     Document Type: Article
Times cited : (41)

References (28)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.