Chemical solution deposition of PZT thin layers on silicon: Densification and stress development

British Ceramic Transactions

Volumn 103, Issue 2, 2004, Pages 97-100

  Ong, R J ^a   Payne, D A ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

Chemical solution deposition; Ellipsometry; Laser reflectance; PZT; Refractive index; Silicon

Indexed keywords

DENSIFICATION; DEPOSITION; ELLIPSOMETRY; HEAT TREATMENT; LASER APPLICATIONS; PIEZOELECTRIC MATERIALS; REFLECTION; SHRINKAGE; SILICON; SOLUTIONS; STRESSES; THERMOANALYSIS;

CHEMICAL SOLUTION DEPOSITION; IN SITU LASER REFLECTANCE; STRESS DEVELOPMENT;

LEAD COMPOUNDS;

EID: 2942615486     PISSN: 09679782     EISSN: None     Source Type: Journal    
DOI: 10.1179/096797804225012756     Document Type: Article

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