Interferometric analysis of nanostructured surface profiles: Correcting material-dependent phase shifts

Applied Optics

Volumn 43, Issue 16, 2004, Pages 3241-3250

  Yatsenko, Leonid P ^a,b   Loeffler, Matthias ^a,c   Shore, Bruce W ^a,d   Bergmann, Klaas ^a  

^a University of Koblenz Landau   (Germany)

^b INSTITUTE OF HYDROBIOLOGY   (Ukraine)

^c IBM   (Germany)

^d NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; APPROXIMATION THEORY; COMPUTER SIMULATION; ERROR ANALYSIS; INTERFEROMETRY; LIGHT REFLECTION; OPTICAL SENSORS; OPTICAL SYSTEMS; PHASE SHIFT; TITANIUM CARBIDE;

NANOMETER ACCURACY; OPTICAL CONSTANTS; PHASE SENSORS; PHASE VARIABILITY;

NANOSTRUCTURED MATERIALS;

EID: 2942594637     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.43.003241     Document Type: Article

References (6)

1. P. Hariharan, B. F. Oreb, and C. H. Freund, "Stroboscopic holographic interferometry: measurements of vector components of a vibration," Appl. Opt. 26, 3899-3903 (1987).
2. G. Sommargren, "Optical heterodyne profilometry," Appl. Opt. 20, 610-618 (1981).
3. J. E. Greivenkamp and J. H. Bruning, "Phase-shifting interferometers," in Optical Shop Testing, D. Malacara, ed. (Wiley, New York, 1992), pp. 501-698.
4. G. Makosch, "Interferometric phase measurement," U.S. patent 5,392,116 (21 February 1995).
5. D. W. Robinson and G. T. Reid, Interferogram Analysis (Institute of Physics, London, 1993).
6. P. de Groot, "Optical properties of alumina titanium carbide sliders used in rigid disk drives," Appl. Opt. 37, 6654-6663 (1998).