Short-term and long-term RSF repeatability for CAMECA SC-Ultra SIMS measurements

Applied Surface Science

Volumn 231-232, Issue , 2004, Pages 768-771

  Barozzi, M ^a   Giubertoni, D ^a   Anderle, M ^a   Bersani, M ^a  

^a ITC IRST   (Italy)

Author keywords

Chained analyses; Long term repeatability; RSF; Short term repeatability

Indexed keywords

AUTOMATION; COMPUTER SOFTWARE; ERROR ANALYSIS; ION BEAMS; ION IMPLANTATION; PARAMETER ESTIMATION; SILICON WAFERS; STABILITY;

CHAINED ANALYSIS; LONG-TERM REPEATABILITY; PROFILOMETERS; SHORT-TERM REPEATABILITY;

SECONDARY ION MASS SPECTROMETRY;

EID: 2942592231     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.03.064     Document Type: Conference Paper

References (6)

1. D. Renard, B. Rasser, M. Schuhmacher, in: G. Gillen, R. Laureau, J. Bennett, F. Stevie (Eds.), Proceedings of the Secondary Ion Mass Spectrometry SIMS XI, Wiley, 1998, p. 771.
2. De Chambost E., Monsallut P., Rasser B., Schuhmacher M. Depth scale calibration of SIMS depth profiles by means of an online crater depth measurement technique. Appl. Surf. Sci. 203/204:2003;391-395.
3. G. Lux, in: A. Benninghoven, C.A. Evans, K.D. McKeegan, H.A. Storms, H.W. Werner (Eds.), Proceedings of the Secondary Ion Mass Spectrometry, SIMSVII, 1989, p. 123.
4. H.D. Young, Statistical Treatment of Experimental Data, McGraw-Hill, 1962.
5. S.Y. Hong, T.E. Hong, J.P. Lee, M.N. Yoon, K. Min, S.Y. Lee, in: A. Benninghoven, P. Bertrand, H.N. Migeon, H.W. Werner (Eds.), Proceedings of the Secondary Ion Mass Spectrometry, SIMS XII, Elsevier, 2000, p. 385.
6. A. Budrevich, J. Hunter, in: D.G. Seiler, et al. (Eds.), Proceedings of the 1998 International Conference on Characterization and Metrology for ULSI Technology, 1998, pp. 169-181.