Testing of a LIGA-microspectrometer for monitoring dissolved nickel concentration when etching nickel and its alloys in aqueous ferric chloride solutions

DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003

Volumn , Issue , 2003, Pages 251-254

  Allen, D M ^a   Almond, H J A ^a   Boubal, D ^a  

^a CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

Costs; Etching; Lenses; Monitoring; Nickel alloys; Photochemistry; Rough surfaces; Surface finishing; Surface roughness; Testing

Indexed keywords

EID: 2942585445     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DTIP.2003.1287046     Document Type: Conference Paper

References (5)

1. D. M. Allen, D. F. Horne and A. J. Hegarty, "Surface textures of annealed AISI 304 stainless steel etched by aqueous ferric chloride - hydrochloric acid solutions", Transactions of the Institute of Metal Finishing, 59, pp. 25-29, 1981.
2. D. M. Allen, The Principles and Practice of Photochemical Machining and Photoetching, IOP, Bristol, 1986.
3. D. M. Allen, "Automation in photochemical machining", Proc. Automation '94, Taipei, Taiwan, ROC, pp. 185-191, July 1994
4. R. B. Maynard, J. J. Moscony and M. H. Saunders, "Ferric chloride etching of Invar", RCA Review, 47, pp. 88-105, March 1986.
5. B. Maynard, MSc thesis, Cranfield University, 2003 (in preparation).