Influence of defects in SiOx thin films on their barrier properties

Thin Solid Films

Volumn 459, Issue 1-2, 2004, Pages 308-312

  Gruniger A ^a   Von Rohr, Ph Rudolf ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Defects; Diffusion barrier; Gas permeation; Silicon oxide

Indexed keywords

COMPOSITE MATERIALS; CRACK INITIATION; DEPOSITION; DIFFUSION; LAMINATES; PACKAGING MATERIALS; PLASTIC FILMS; SILICA;

DIFFUSION BARRIERS; GAS PERMEATION;

THIN FILMS;

EID: 2942566064     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.12.146     Document Type: Conference Paper

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