Radio frequency (10 - 23 MHz)-assisted excitation of a microdischarge with a piezoelectric transformer

Plasma Sources Science and Technology

Volumn 13, Issue 2, 2004, Pages 278-281

  Ostrom, N P ^a   Vojak, B A ^a   Eden, J G ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; ELECTRIC EXCITATION; ELECTRIC INDUCTORS; ELECTRIC TRANSFORMERS; PIEZOELECTRIC DEVICES; PLASMA DENSITY; PLASMAS;

MICRODISCHARGE DEVICES; MICROPLASMAS; PIEZOELECTRIC TRANSFORMERS; RADIO FREQUENCY (RF) ASSISTED EXCITATION;

ELECTRIC DISCHARGES;

EID: 2942558557     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/13/2/012     Document Type: Article

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