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Volumn 36, Issue 3 SUPPL. B, 1997, Pages 1428-1432
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A study on the fabrication of a multigate/multichannel polysilicon thin film transistor
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Author keywords
Field effect mobility; Multigate multichannel; Off current; On current; Polysilicon; Thin film transistor
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Indexed keywords
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EID: 2942549748
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.36.1428 Document Type: Article |
Times cited : (7)
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References (11)
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