Neutron reflectivity study of ultrathin SiO2 on Si

Applied Physics Letters

Volumn 84, Issue 19, 2004, Pages 3816-3818

  Bertagna, Valérie ^a   Erre, René ^a   Saboungi, Marie Louise ^a   Petitdidier, Sébastien ^b   Lévy, Didier ^b   Menelle, Alain ^c  

^a Centre National de la Recherche Scientifique   (France)

^b STMICROELECTRONICS   (France)

^c CEA SACLAY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; CHEMICAL BONDS; ELECTROCHEMISTRY; ELLIPSOMETRY; ETCHING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MICROELECTRONICS; SILICA; SURFACE ROUGHNESS; THERMOOXIDATION; THICKNESS MEASUREMENT;

ELECTROCHEMICAL OXIDATION; IMPEDANCE SPECTROSCOPY; NEUTRON REFLECTIVITY; THERMAL OXIDES;

ULTRATHIN FILMS;

EID: 2942546501     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1741034     Document Type: Article

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