A lithographic process for integrated organic field-effect transistors

IEEE/OSA Journal of Display Technology

Volumn 1, Issue 2, 2005, Pages 289-294

  Kymissis, Ioannis ^a,b,d   Akinwande, Akintunde Ibitayo ^a,b,c,e   Bulović, Vladimir ^b,c  

^a IEEE   (United States)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^c Massachusetts Institute of Technology Cambridge   (United States)

^d MIT Laboratory for Organic Optics and Electronics (LOOE)   (United States)

^e MIT's Electrical Engineering and Computer Science Department

Author keywords

Organic compounds; Thin film transistors

Indexed keywords

FIELD-EFFECT MOBILITY; INTEGRATED ORGANIC FIELD-EFFECT TRANSISTORS; PENTACENE;

INTEGRATED CIRCUITS; ORGANIC COMPOUNDS; PHOTOLITHOGRAPHY; THIN FILM TRANSISTORS;

GATES (TRANSISTOR);

EID: 29344467420     PISSN: 1551319X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JDT.2005.858915     Document Type: Article

References (28)

1. G. H. Gelinck, H. E. A. Huitema, E. Van Veenendaal, E. Cantatore, L. Schrijnemakers, J. B. P. H. Van der Putten, T. C. T. Geuns, M. Beenhakkers, J. B. Giesbers, B. H. Huisman, E. J. Meijer, E. M. Benito, F. J. Touwslager, A. W. Marsman, B. J. E. Van Rens, and D. M. De Leeuw, "Flexible active-matrix displays and shift registers based on solution-processed organic transistors," Nature Materials, vol. 3, no. 2, pp. 106-110, Feb. 2004.
2. T. Someya and T. Sakurai, "Integration of orgnaic field effect transistors and rubbery pressure sensors for artificial skin applications, " presented at the Int. Electron Devices Meeting, Washington, DC, 2003.
3. P. F. Baude, D. A. Ender, M. A. Haase, T. W. Kelley, D. V. Muyres, and S. D. Theiss, "Pentacene-based radio-frequency identification circuitry," Appl. Phys. Lett., vol. 82, no. 22, pp. 3964-3966, Jun. 2003.
4. M. G. Kane, J. Campi, M. S. Hammond, F. P. Cuomo, B. Greening, C. D. Sheraw, J. A. Nichols, D. J. Gundlach, J. R. Huang, C. C. Kuo, L. Jia, H. Klauk, and T. N. Jackson, "Analog and digital circuits using organic thin-film transistors on polyester substrates," IEEE Electron Device Lett., vol. 21, no. 11, pp. 534-536, Nov. 2000.
5. C. D. Sheraw, L. Zhou, J. R. Huang, D. J. Gundlach, T. N. Jackson, M. G. Kane, I. G. Hill, M. S. Hammond, J. Campi, B. K. Greening, J. Francl, and J. West, "Organic thin-film transistor-driven polymer-dispersed liquid crystal displays on flexible polymeric substrates," Appl. Phys. Lett., vol. 80, no. 6, pp. 1088-1090, Feb. 2002.
6. H. Klauk, M. Halik, U. Zschieschang, F. Eder, G. Schmid, and C. Dehm, "Pentacene organic transistors and ring oscillators on glass and on flexible polymeric substrates," Appl. Phys. Lett., vol. 82, no. 23, pp. 4175-4177, Jun. 2003.
7. A. R. Brown, C. P. Jarrett, D. M. deLeeuw, and M. Matters, "Field-effect transistors made from solution-processed organic semiconductors," Synthetic Metals, vol. 88, no. 1, pp. 37-55, Apr. 1997.
8. H. E. A. Huitema, G. H. Gelinck, J. B. P. H. van der Putten, K. E. Kuijk, K. M. Hart, E. Cantatore, and D. M. de Leeuw, "Active-matrix displays driven by solution processed polymeric transistors," Advanced Materials, vol. 14, no. 17, p. 1201, Sep. 2002.
9. C. J. Drury, C. M. J. Mutsaers, C. M. Hart, M. Matters, and D. M. de Leeuw, "Low-cost all-polymer integrated circuits," Appl. Phys. Lett., vol. 73, no. 1, pp. 108-110, Jul. 1998.
10. B. K. Crone, A. Dodabalapur, R. Sarpeshkar, R. W. Filas, Y. Y. Lin, Z. Bao, J. H. O'Neill, W. Li, and H. E. Katz, "Design and fabrication of organic complementary circuits," J. Appl. Phys., vol. 89, no. 9, pp. 5125-5132, May 2001.
11. W. Fix, A. Ullmann, J. Picker, and W. Clemens, "Fast polymer integrated circuits," Appl. Phys. Lett., vol. 81, no. 9, pp. 1735-1737, Aug. 2002.
12. Y. Y. Lin, A. Dodabalapur, R. Sarpeshkar, Z. Bao, W. Li, K. Baldwin, V. R. Raju, and H. E. Katz, "Organic complementary ring oscillators," Appl. Phys. Lett., vol. 74, no. 18, pp. 2714-2716, May 1999.
13. T. W. Kelley, D. V. Muyres, P. F. Baude, T. P. Smith, and T. D. Jones, "High performance organic thin film transistors," in Material Research Society Symp. Proc., vol. 771, C. D. Frisbie Neil, C. G. Paul, W. M. Blom, and C. D. Dimitrakopoulos, Eds., Boston, MA, 2003, pp. L6.5.1-L6.5.11.
14. G. B. Blanchet, Y. L. Loo, J. A. Rogers, F. Gao, and C. R. Fincher, "Large area, high resolution, dry printing of conducting polymers for organic electronics," Appl. Phys. Lett., vol. 82, no. 3, pp. 463-465, Jan. 2003.
15. K. E. Paul, W. S. Wong, S. E. Ready, and R. A. Street, "Additive jet printing of polymer thin-film transistors," Appl. Phys. Lett., vol. 83, no. 10, pp. 2070-2072, Sep. 2003.
16. I. Kymissis, C. D. Dimitrakopoulos, and S. Purashothaman, "Patterning pentacene organic thin film transistors," J. Vac. Sci. Technol. B, vol. 20, no. 3, pp. 956-959, May-Jun. 2002.
17. D. J. Gundlach, Y. Y. Lin, T. N. Jackson, S. F. Nelson, and D. G. Schlom, "Pentacene organic thin-film transistors-molecular ordering and mobility," IEEE Electron Device Lett., vol. 18, no. 3, pp. 87-89, Mar. 1997.
18. Y. Y. Lin, D. J. Gundlach, S. F. Nelson, and T. N. Jackson, "Stacked pentacene layer organic thin-film transistors with improved characteristics," IEEE Electron Device Lett., vol. 18, no. 12, pp. 606-608, Dec. 1997.
19. I. Kymissis, C. D. Dimitrakopoulos, and S. Purushothaman, "High-performance bottom electrode organic thin-film transistors," IEEE Trans. Electron Devices, vol. 48, no. 6, pp. 1060-1064, Jun. 2001.
20. A. R. Volkel, R. A. Street, and D. Knipp, "Carrier transport and density of state distributions in pentacene transistors," Phys. Rev. B, vol. 66, no. 19, Nov. 2002.
21. G. Horowitz, "Tunneling current in polycrystalline organic thin-film transistors," Adv. Functional Materials, vol. 13, no. 1, pp. 53-60, Jan. 2003.
22. D. Schroder, Semiconductor Material and Device Characterization, 2nd ed. New York: Wiley, 1998, pp. 242-248.
23. C. D. Dimitrakopoulos, B. K. Furman, T. Graham, S. Hegde, and S. Purushothaman, "Field-effect transistors comprising molecular beam deposited alpha, omega-di-hexyl-hexathienylene and polymeric insulator," Synthetic Metals, vol. 92, no. 1, pp. 47-52, Jan. 1998.
24. T. Yasuda, K. Fujita, H. Nakashima, and T. Tsutsui, "Organic field-effect transistors with gate dielectric films of poly-p-xylylene derivatives prepared by chemical vapor deposition," Jpn. J. Appl.Phys. pt. 1 - Regular Papers, Short Notes, and Review Papers, vol. 42, no. 10, pp. 6614-6618, Oct. 2003.
25. Amer. Soc. Testing and Materials, "Standard test methods for measuring adhesion by tape test," Standard D3359-02 Test B, 2002.
26. D. J. Gundlach, T. N. Jackson, D. G. Schlom, and S. F. Nelson, "Solvent-induced phase transition in thermally evaporated pentacene films," Appl. Phys. Lett., vol. 74, no. 22, pp. 3302-3304, May?? 1999.
27. A. I. Wang, I. Kymissis, V. Bulovic, and A. I. Akinwande,. Unpublished data.
28. M. W. Lee and C. K. Song, "Oxygen plasma effects on performance of pentacene thin film transistor," Jpn. J, Appl. Phys. pt. 1 - Regular Papers, Short Notes, and Review Papers, vol. 42, no. 7A, pp. 4218-4221, Jul. 2003.