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Volumn 5894, Issue , 2005, Pages 1-11
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MEMS tip/tilt & piston mirror arrays as diffractive optical elements
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Author keywords
Adaptive optics; Deformable mirror; MEMS; Spatial light modulator
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Indexed keywords
DIFFRACTION GRATINGS;
DIFFRACTIVE OPTICS;
LENSES;
LIGHT MODULATION;
MICROELECTROMECHANICAL DEVICES;
ARRAY FILL FACTOR;
DEFORMABLE MIRRORS;
FRESNEL LENS;
MIRRORS;
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EID: 29344465756
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.620566 Document Type: Conference Paper |
Times cited : (15)
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References (6)
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